Ultra pure water system for semiconductor and packaging industries--Hubei Lingtan M&E Equipment Co.,Ltd.

Ultra pure water system for semiconductor and packaging industries

The resistivity of 18.25M Ω· cm is considered the optimal theoretical water quality indicator for ultrapure water. With the development of the microelectronics industry, using only this indicator to measure ultrapure water is far from enough. Particles in ultrapure water TOC、 Dissolved oxygen, silicon dioxide, bacteria, and other PPT grade metal ions have become the main factors affecting the quality and yield of products in the microelectronics industry and other industries.

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Typical process flow in the semiconductor industry

ASTM Water Quality Standards for Ultra Pure Water in the Electronic Semiconductor Industry in the United States

Parameter	Type E-1	Type E-1.1	Type E-1.2
Linewidth(microns)	1.0-0.5	0.5-0.25	0.25-0.18
Resistivity,25℃	18.2	18.2	18.2
*Temperature
*Pressure
Endotoxin unit(EU/ml)	0.03	0.03	0.03
TOC(μg/L)	5	2	1
Dissolved oxygen(μg/L)	1	1	1
Residue after evaporation(μg/L)	1	0.5	0.1
SEM particles/L(micron range)
0.1-0.2	1000	1000	200
0.2-0.5	500	500	100
0.5-0.1	50	50	1
10	-		-
On-line particles/L(micron range)
Particles(>0.05micron)
0.05-0.1	500	500	100
0.1-0.2	300	300	50
0.2-0.3	50	50	20
0.3-0.5	20	20	10
>0.5	4	4	1
Bacteria/100 mL
100ml Sample	1	1	1
1L Sample	1	1	0.1
Silica

Silica-total(μg/L)	3	0.5	0.5
Silica-dissolved(μg/L)	1	0.1	0.05
lons and metals(μg/L)
Ammonium	0.1	0.10	0.05
Bromide	0.1	0.05	0.02
Chloride	0.1	0.05	0.02
Fluoride	0.1	0.05	0.03
Nitrate	0.1	0.05	0.02
Nitrite	0.1	0.05	0.02
Phosphate	0.1	0.05	0.02
Sulfate	0.1	0.05	0.02
Aluminum	0.05	0.02	0.005
Barium	0.05	0.02	0.001
Boron	0.05	0.02	0.005
Calcium	0.05	0.02	0.002
Chromium	0.05	0.02	0.002
Copper	0.05	0.02	0.002
Iron	0.05	0.02	0.002
Lead	0.05	0.02	0.005
Lithium	0.05	0.02	0.003
Magnesium	0.05	0.02	0.002
Manganese	0.05	0.02	0.002
Nicke	0.05	0.02	0.002
Potassium	0.05	0.02	0.005
Sodium	0.05	0.02	0.005
Strontium	0.05	0.02	0.001
Zinc	0.05	0.02	0.002

*Temperature and pressure values to be determined

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